000 00615nam a2200229Ia 4500
003 OSt
005 20230518100602.0
008 210423s2008 xx 000 0 und d
020 _a978-0-13-045018-0
040 _cAL
041 _aeng
082 _a621.55 HATI
100 _aHATA (David M)
_9107688
245 _aIntroduction to vacuum technology
260 _aNew Jersey
_bPearson
_c2008
300 _avii,187
_bPB
365 _b8643.33
_cUSD
650 _aApplied Physics
_9107690
650 _aVacuum & Pneumatic Technologies
_9107692
906 _aIntroduction ; technology ; vacuum
942 _2ddc
_cBK
999 _c167686
_d167686