Hsu, Tai Ram. <br/><br/>
Mems and microsystems: design and manufacture.  Design and manufacture. 

 - 1 
 - New Delhi  Tata McGraw Hill Publishing Company Ltd  2002 
 - xii,436 
<br/><br/><label>ISBN: </label>007048709X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Digital Systems
<br/><br/><label>Dewey Class. No.: </label>621.381 HSUT